Projekt CHIP MBE završen posljednjih godina

Tehnologija

Molekularna epitaksija snopa, ili MBE, nova je tehnika za rastuće visokokvalitetne tanke filmove kristala na kristalnim supstratima. In ultra-high vacuum conditions, by the heating stove is equipped with all kinds of required components and generate steam, through holes formed after collimating beam atomic or molecular beam, direct injection to the appropriate temperature of the single crystal substrate, controlling molecular beam to the substrate scanning at the same time, it can make the molecules or atoms in crystal alignment layers to form a thin film on a substrate "growth".

For the normal operation of MBE equipment, high purity, low pressure and ultra-clean liquid nitrogen is required to be continuously and stably transported to the cooling chamber of the equipment. In general, a tank that provides liquid nitrogen has an output pressure between 0.3MPa and 0.8MPa.Liquid nitrogen at -196℃ is easily vaporized into nitrogen during pipeline transportation. Once the liquid nitrogen with a gas-liquid ratio of about 1:700 is gasified in the pipeline, it will occupy a large amount of liquid nitrogen flow space and reduce the normal flow at the end of the liquid nitrogen pipeline. Osim toga, u spremniku tekućeg dušika vjerojatno će biti krhotina koja nije očišćena. U cjevovodu s tekućim dušikom, postojanje vlažnog zraka također će dovesti do stvaranja ledene šljake. Ako se ove nečistoće ispuštaju u opremu, to će prouzrokovati nepredvidivo oštećenje opreme.

Therefore, the liquid nitrogen in the outdoor storage tank is transported to the MBE equipment in the dust-free workshop with high efficiency, stability and clean, and the low pressure, no nitrogen, no impurities, 24 hours uninterrupted, such transportation control system is kvalificirani proizvod.

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Podudaranje MBE opreme

Since 2005, HL Cryogenic Equipment (HL CRYO) has been optimizing and improving this system and cooperating with international MBE equipment manufacturers. Proizvođači MBE opreme, uključujući DCA, Reber, imaju suradničke odnose s našom tvrtkom. Proizvođači MBE opreme, uključujući DCA i Reber, surađivali su u velikom broju projekata.

Riber SA is a leading global provider of molecular beam epitaxy (MBE) products and related services for compound semiconductor research and industrial applications. Uređaj Riber MBE može na supstratu nasloniti vrlo tanke slojeve materijala, s vrlo visokim kontrolama. The vacuum equipment of HL Cryogenic Equipment (HL CRYO) is equipped with Riber SA The largest equipment is Riber 6000 and the smallest is Compact 21. It is in good condition and has been recognized by customers.

DCA je vodeći svjetski oksid MBE. Od 1993. godine provedena je sustavni razvoj tehnika oksidacije, provedena je grijanje supstrata antioksidanata i antioksidans. Iz tog razloga, mnogi vodeći laboratoriji odabrali su DCA oksid tehnologiju. Kompozitni poluvodički MBE sustavi koriste se širom svijeta. The VJ liquid nitrogen circulating system of HL Cryogenic Equipment (HL CRYO) and the MBE equipment of multiple models of DCA have the matching experience in many projects, such as the model P600, R450, SGC800 etc.

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Tablica performansi

Šangajski institut za tehničku fiziku, Kineska akademija znanosti
11. institut China Electronics Technology Corporation
Institut poluvodiča, Kineska akademija znanosti
Huawei
Akademija Alibaba Damo
Powertech Technology Inc.
Delta Electronics Inc.
Suzhou Everbright Photonics

Post Vrijeme: svibanj-26-2021

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